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EZ6-S 6inch wafer spin coating machine with programmable control

产品描述

Features
1.Maximum for 6 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm 

4.LCD Panel with Enghlish Instruction Manual Book
5.Oiless vacuum pump with low noise

技术参数

Model No.EZ6-S
Chamber Size180mm
Maximum wafer sample6 inch (10cm~150mm)
Vacuum Chuck

3 pieces standard vacuum chuck

Size: O.D8mm, 15mm,55mm for immediately using

***Customized vacuum chuck is availiable***

Spin Speed100~12000RPM
Acceleration adjustable range100~3000-rpm/s
Each step max coating time3000s
Spin Control

Programmable control,10programmable with each 10 steps can restore

Spin Resolution1 rpm
Power supplyAC110-230V, adjustable
Dimension358*256*258mm



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