河南创合实验室设备有限公司

首页 > 产品中心 > 真空干燥箱

EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump

产品描述

Features
1.Maximum for 4 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm 

4.LCD Panel with Enghlish Instruction Manual Book
5.Oiless vacuum pump with low noise

技术参数

Model No.EZ4
Chamber Size134mm
Maximum wafer sample4 inch (100mm)
Vacuum Chuck

3 pieces standard vacuum chuck

Size: O.D8mm, 15mm,55mm for immediately using

***Customized vacuum chuck is availiable***

Spin Speed100~999RPM
Spin Control

Programmable control,5 programmable with each 5 steps can restore

Spin Resolution1 rpm
Power supplyAC110-230V, adjustable
Dimension250*210*200mm



相关产品

搜索
联系我们
  • 手机: 0371-55237755 蒋经理13673652446 陈经理13938281451 薛经理15638280101
  • 邮箱: chuanghe@chuanghelab.cn
  • 地址: 郑州高新技术产业开发区莲花街338号10号楼3层13号
关注我们

备案号: 豫ICP备19018066号-1

豫公网安备 41019702002676号